Gas Mass Flow Meter and Mass Flow Controller
Skype:cixi-kitty
Mobile phone(whatsapp):(86)18930647859
Email: sales3@gnflowmeter.com
Website: http://www.gninstruments.com/english/html/58/
Introduction of CX-XD300/600 Mirco gas mass flow meter
Application:Mass Flow Meter and Mass Flow Controller are use to measure and control gas accurately. It’s widely used in fields of Semi-conductor, Vaccume ,Solar energy,Analize instrument, photoelectricity,Gas manufactory ,Medicare,Power etc.
Main features
1.Very low zero drift and temperature drift.
2.It can measure over 60 types of gas.
3.User can set medium parameters
4.Customize flow range and low pressure difference
5.Real-time curve output.
6.User can select different color and collect data into EXCEL form.
7.Controlling form: RS232, RS485,0-5V, 4-20MA
8.Different section control
9.Different section combination and High-low level alarm.
Technical parameters
Flow range
|
(0-5,10,20,30,50,100,200,300,500)SCCM
(0-1,2,3,5,10,20,30,50,100)SLM |
Accuracy
|
1%FS
|
Linearity
|
0.5%FS
|
Repeatability
|
0.2%FS
|
Responding time
|
Less than 1s
|
Pressure difference
|
(0.0500.3)Mpa
|
Max.Pressure
|
10MPa
|
Working temperature
|
5-65C
|
Input/output
|
Digital:RS232/RS485
Analog: 0-5vdc or 4-20mA |
Power Supply
|
7-16vdc,1A
|
Note:XD300 without display and XD600 with LCD displaly
| |
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